The INFICON VSC150 Vacuum Switch is an absolute pressure switch with an adjustable electrical switching contact from 0.5 to 2000 mbar. The mechanical design allows a short therm overload of 3000 mbar without imparing the switching accuracy of ±0.1 mbar. The VSC150 Vacuum Switch is preadjusted to the customer specified pressure setting.
Advantages
- High switching accuracy (±0.1 mbar)
- Stable long term operating characteristics
- Rugged, corrosion resistant design
- Increased switching capability when using switching amplifier
- Switching contacts (normally closed) in the reference chamber provides protection against process media
- Adapter available for differential pressure measurement
Applications
- Pressure switch or differential pressure switch to control valves, pumps, power supplies
- Load lock chambers
- Process chambers
ASSOCIATED TECHNICAL INFORMATION
Brochures and Datasheets:
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Datasheet - VSC150 Vacuum Switch (tiba32e1.pdf)
English
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Operations and Maintenance Manuals:
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Operating Manual - VSC150 Vacuum Switch (tina42e1.pdf)
English
| German
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