|
Bayard-Alpert Pirani Gauge BPG400
The INFICON Bayard-Alpert Pirani Combination Gauge, BPG400, functions as two gauges in a single compact unit measuring from 5 X 10 -10 mbar to atmosphere (3.8 X 10 -10 Torr to atmosphere). Combining technologies reduces the complexity of installation, setup, and integration. Choose the BPG400 for affordable and repeatable process to base pressure measurements in one economical package.
Advantages
- Extremely wide measurement range from 5 X 10 -10 mbar to atmosphere (3.8 X 10 -10 Torr to atmosphere)
- Excellent repeatability in the process pressure range from 10 -8 ... 10 -2 mbar of 5%
- The Pirani interlock protects the Bayard-Alpert system from premature filament burnout and excess contamination from high pressure operation
- Long-life yttrium oxide coated iridium filament
- Optional graphic display and Fieldbus interfaces available
- Automatic high vacuum Pirani adjustment reduces operator interventions
Applications
- Pressure measurement in semiconductor process and transfer chambers
- Industrial coating
- General vacuum measurement and control in the low to ultra high vacuum range
LIBRARY
|
