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> Electron Beam Gun Crucible Indexer
> FabGuard Suite
> In Situ Particle Detectors
> Integrated Process Monitoring
> Leak Detectors
> Quartz Monitor Crystals
> RF Sensing Technology with FabGuard
> Residual Gas Analyzers
> Thin Film Deposition Controllers/QCM
> Vacuum Components
>Vacuum Gauges
> Vacuum Valves and Gas Dosing Systems

Vacuum Gauges

View the 2007-2008 Vacuum Control Catalog
INFICON vacuum gauges offer superior accuracy and reliability in compact designs. Combining multiple technologies in a single controller for total pressure measurement and control of vacuum processes.

  • INFICON ceramic capacitance diaphragm gauges (CDG) outperform all metal-diaphragm CDGs in temperature and mechanical stability, zero drift, accuracy, repeatability, and corrosion resistance. Innovating beyond conventional technology, INFICON ceramic capacitance diaphragm gauges use an ultrapure aluminum oxide ceramic diaphragm, replacing traditional metal diaphragms, for vacuum measurements of superior accuracy and repeatability.

  • INFICON gas-type-independent Pirani Capacitance Diaphragm combines patented dual Pirani sensors and gas-type-independent ceramic capacitance diaphragm technology in a money-saving, space-saving gauge.

  • INFICON Bayard Alpert Capacitance Diaphragm Gauge measures 13 decades using one compact gauge, one connection, one sensor cable and one A/D converter, dramatically reducing complexity and cost.

SKY Capacitance Diaphragm Gauges

Hot Ionization Gauges

Pirani Gauges

Cold Cathode Gauges

Vacuum Gauge Controllers

Vacuum Switch