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Pirani Capacitance Diaphragm Gauge PCG400 / PCG410
The INFICON PCG Pirani Capacitance Diaphragm Gauge is the first vacuum gauge to combine the advantages of a ceramic capacitance diaphragm gauge and the cost effectiveness of a Pirani in one compact package. In the measurement range between 100 mbar (75 Torr) and atmosphere, where Pirani sensors lose sensitivity, the capacitance diaphragm technology supplies accurate, gas-type and flow independent measurement values up to 1500 mbar (1125 Torr). Available with up to two integrated relays, the PCG can eliminate the need for 1/2 atm or other expensive switches. To simplify tool integration, the Pirani and CDG signals are combined into a single log/linear analog output spanning the full-range of the gauge.
Advantages
- Gas-type-independent above 100 mbar (75 Torr) - enables safe venting with any gas mixture
- Higher accuracy and reproducibility at atmosphere - for reliable detection of atmospheric pressure, no frequent readjustment at atmospheric pressure
- Mounts in any orientation - provides engineering freedom in tool design
- Faster atmosphere detection - eliminates waiting time, thus shortening process cycle time
- Compact design - saves valuable space on the tool
- One linear log output signal over the entire range - for easy tool integration
Applications
- Loadlock control
- Forevacuum pressure monitoring
- Safety circuits in vacuum systems
- General measurement and control in the medium and rough vacuum range
- Control of high vacuum ionization gauges
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