The INFICON Inverted Magnetron Pirani Gauges, MPG400 and MPG401, measure from 5 X 10 -9 mbar to atmosphere (3.8 X 10 -9 Torr to atmosphere). Combining technologies into one single compact unit with one logarithmic analog output signal significantly reduces the complexity of installation, setup and integration.
Advantages
- Combination gauge - Inverted Magnetron and Pirani
- Wide measurement range from 5 X 10 -9 mbar to atmosphere
- No filament to burn out
- Excellent ignition properties
- Easy to clean
- FPM or metal-sealed feedthrough
- LED indicator for high voltage on
- Logarithmic analog output signal
Applications
- High vacuum pressure monitoring
- Base pressure for evaporation and sputtering systems
- General vacuum measurement and control in the medium and high vacuum range
ASSOCIATED TECHNICAL INFORMATION
Brochures and Datasheets:
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Datasheet - MPG400, MPG401 (tiba30e1.pdf)
English
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Operations and Maintenance Manuals:
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Operating Instructions - MPG400, MPG401 (tima48e1.pdf)
English
| German
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