Inficon





Worldwide


Semiconductor
>    Vacuum Gauges    >   Penning Gauge with Fieldbus   

Products:


> FabGuard Software Suite
> Integrated Process Monitoring
> Leak Detectors
> RF Sensing Technology with FabGuard
> Residual Gas Analyzers
> Vacuum Components
> Vacuum Gauges
 
•  BCG450 TripleGauge Bayard-Alpert Pirani Capacitance Diaphragm Gauge
•  BPG400 Bayard-Alpert Pirani Gauge
•  BPG402 Bayard-Alpert Pirani Gauge
•  Bayard-Alpert Gauge
•  Bayard-Alpert Gauge with Fieldbus
•  Bayard-Alpert Pirani Capacitance Diaphragm Gauge - TripleGauge
•  Bayard-Alpert Pirani Capactiance Diaphragm Gauge with Fieldbus - TripleGauge
•  Bayard-Alpert Pirani Gauge with Fieldbus
•  CDG025 AllCeramic Capacitance Diaphragm Gauge
•  CDG025D Capacitance Diaphragm Gauge
•  CDG045D Capacitance Diaphragm Gauge
•  CDG100D Capacitance Diaphragm Gauge
•  CDG160 AllCeramic Capacitance Diaphragm Gauge
•  CDG160D/200D Capacitance Diaphragm Gauge
•  HPG400 High Pressure Ionization Pirani Gauge
•  High Pressure Hot Ionization Pirani Gauge
•  High Pressure Hot Ionization Pirani Gauge with Fieldbus
•  MPG400 / MPG401 Inverted Magnetron Pirani Gauge
•  PCG550 Pirani Capacitance Diaphragm Gauge
•  PEG050 Penning Gauge
•  PEG100 Penning Gauge
•  PGD400 Pirani Gauge Display
•  PSG050 / PSG051 Pirani Standard Gauge
•  PSG100 / PSG101 Pirani Standard Gauge
•  PSG500/-S, PSG502-S, PSG510-S, PSG512-S Pirani Standard Gauge
•  PSG55X Pirani Standard Gauge
•  Penning Gauge
•  Penning Gauge with Fieldbus
•  Pilot Vacuum Gauge
•  Pirani Capacitance Diaphragm Gauge
•  Pirani Standard Gauge
•  Pirani Standard Gauge with Fieldbus
•  SKY Capacitance Diaphragm Gauge
•  SKY Capacitance Diaphragm Gauge with Fieldbus
•  SKY High-temperature Capacitance Diaphragm Gauge
•  VGC401 / VGC402 / VGC403 Vacuum Gauge Controller
•  VSA100 Vacuum Switch
•  VSA200 Vacuum Switch
•  VSC150 Vacuum Switch
•  Vacuum Gauge Controllers - 400 Series
   
> Vacuum Valves and Gas Dosing Systems



Penning Gauge with Fieldbus

Small with superior performance

The Penning Gauge PEG100 provides reliable high vacuum measurements. The rugged penning cold cathode sensor has no filament to burn out. Due to titanium cathode plates and the reduced high voltage after plasma ignition, the gauge can be operated also in sputtering applications. The fieldbus options, in addition to the logarithmic analog output signal, allow easy integration into vacuum systems using Profibus DP or DeviceNet protocols.

User Advantages:
  • Wide measurement range from 1 x 10 -9 to 1 x 10 -2 mbar
  • All-metal cold cathode sensor (Penning) with ceramic feedthrough
  • New electrode geometry provides excellent ignition properties
  • Decreased high voltage after plasma ignition and titanium cathode plates reduce risk of contamination, even during sputtering operations with argon
  • The anode ring and the titanium cathode can be cleaned or replaced easily
  • Minimal magnetic field intensity adjacent to gauge
  • LED indicator for power on and plasma ignited
  • Logarithmic analog output signal
  • Fieldbus interface (Profibus DP, DeviceNet) for easy integration into vacuum systems using network communications


Typical Applications:
  • High vacuum pressure monitoring
  • Evaporation and sputtering systems
  • General vacuum measurement and control in the fine and high vacuum range


The Penning Gauge PEG100 is a cold cathode sensor based on the well proven principle of Penning. For degassing of the all-metal sensor with Al 2 O 3 current feedthrough, the housing of the transmitter with its electronics and magnet may easily be removed. The magnet offers a closed magnetic field for negligible stray field. The PEG therefore may also be installed close to sensitive parts within a system. The anode ring and the titanium cathode plates may be exchanged easily for quick maintenance should they become contaminated. Since sputtered titan is not magnetic - limiting the build up of short circuits within the sensor - the risk of contamination is greatly reduced. The newly designed cathode plate acts as a baffle for the sensor.


Fieldbus

Fieldbus allows processes or applications the flexibility and control of network communications. It permits communication of exact digital information, independent control, maintenance and diagnostic routines for each connected instrument and simplifies your connection diagram. The measures of control include: monitoring of measurement values, automatic zero point adjustment of gauges, update operator of scheduled maintenance work, warning signals in case of instrument failure, and more.


Profibus DP

The central automation systems, e.g. PLC/PC or process control systems, communicate through a fast serial connection with decentralized instruments such as I/O, motors, valves and pressure transducers. The exchange of data with the decentralized instruments takes place mostly in cycles. The basic functions of the Profibus DP Communication Profile also include acyclic communication services for parameter setting, controlling, monitoring, and alert functions of intelligent instruments.

DeviceNet™

The DeviceNet interface supports polling, bit strobe and change of state/cyclic commands. Like with other DeviceNet instruments the user can monitor and control all available sensor functions.

ASSOCIATED TECHNICAL INFORMATION:

ASSOCIATED TECHNICAL INFORMATION

Operations and Maintenance Manuals:

   Gebrauchsanleitung - tina15d1-a, PEG100-P, Profibus-DP Schnittstelle f?ning Gauge (tina15d1-a.pdf)
English

   Operating Manual - tina12e1, PEG100-D, DeviceNet Interface for Penning Gauge (tina12e1.pdf)
English

   Operating Manual - tina15e1-a, PEG100-P, Profibus-DP Interface for Penning Gauge (tina15e1-a.pdf)
English

Request Further Information from Inficon.
REQUEST INFO. I'd like additional information, click here.

QUESTIONS? Contact your local representative, click here.

ASSOCIATED TECHNICAL INFORMATION

Operations and Maintenance Manuals:

   Gebrauchsanleitung - tina15d1-a, PEG100-P, Profibus-DP Schnittstelle f?ning Gauge (tina15d1-a.pdf)
English

   Operating Manual - tina12e1, PEG100-D, DeviceNet Interface for Penning Gauge (tina12e1.pdf)
English

   Operating Manual - tina15e1-a, PEG100-P, Profibus-DP Interface for Penning Gauge (tina15e1-a.pdf)
English

Request Further Information from Inficon.
REQUEST INFO. I'd like additional information, click here.


Contact your local representative.


GOT A SHOT? Send us your photo of an INFICON product at work. We'll send you a very cool gift!